Aerospace applications of MEMS

Siegfried W. Janson

doi:10.1117/12.601836

22 January 2005 Aerospace applications of MEMS

Siegfried W. Janson

Proceedings Volume 5717, MEMS/MOEMS Components and Their Applications II; (2005) https://doi.org/10.1117/12.601836
Event: MOEMS-MEMS Micro and Nanofabrication, 2005, San Jose, California, United States

Abstract

MEMS offer ultra-low mass, low-power components which may integrated into a variety of aerospace systems. Aerospace-specific MEMS are limited by the relatively small size of the aerospace vehicle market compared to traditional MEMS markets such as automobiles and home computers. Nevertheless, significant applications such as inertial guidance, micro-vehicle propulsion, and active antennas will drive evolution of existing MEMS technologies to meet these needs. MEMS enable many near-term micro-vehicle concepts, and possible mid-to-far term applications such as aerodynamic skin flow control and active aerospace structures.

Citation Download Citation

Siegfried W. Janson "Aerospace applications of MEMS", Proc. SPIE 5717, MEMS/MOEMS Components and Their Applications II, (22 January 2005); https://doi.org/10.1117/12.601836

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