Novel cantilever for biosensing applications

Omkar G. Karhade; Sudhir S. Chiluveru; Prakash R. Apte

doi:10.1117/12.589679

22 January 2005 Novel cantilever for biosensing applications

Omkar G. Karhade, Sudhir S. Chiluveru, Prakash R. Apte

Proceedings Volume 5718, Microfluidics, BioMEMS, and Medical Microsystems III; (2005) https://doi.org/10.1117/12.589679
Event: MOEMS-MEMS Micro and Nanofabrication, 2005, San Jose, California, United States

Abstract

Chemomechanical actuation of a microcantilever beam induced by biomolecular binding such as DNA hybridization and antibody-antigen binding is an important principle useful in biosensing applications. As the magnitude of the forces involved is very small, increasing the sensitivity of the microcantilever beams involved is a priority. In this paper we are considering to achieve this by structural variation of the cantilevers. Merely decreasing the thickness of the microcantilever may improve the sensitivity, but it gives rise to the disadvantages of 'arching' and lesser reliability due to greater probability of defects during fabrication. We consider a 'ribbed' cantilever that eliminates the disadvantages while improving the sensitivity simultaneously. Simulations for validation have been performed using the finite element analysis software ANSYS 8.0. The simulations reveal that a ribbed microcantilever is almost as sensitive as a thin cantilever and has relatively very low arching effect. Simulations also reveal that higher the arching lower is the sensitivity.

Citation Download Citation

Omkar G. Karhade, Sudhir S. Chiluveru, and Prakash R. Apte "Novel cantilever for biosensing applications", Proc. SPIE 5718, Microfluidics, BioMEMS, and Medical Microsystems III, (22 January 2005); https://doi.org/10.1117/12.589679

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