A membrane mirror with transparent electrode for adaptive optics

Peter L. Kurczynski; Harold M. Dyson; Bernard Sadoulet; J. Eric Bower; Warren Y.-C. Lai; William M. Mansfield; J. Ashley Taylor

doi:10.1117/12.593234

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22 January 2005 A membrane mirror with transparent electrode for adaptive optics

Peter L. Kurczynski, Harold M. Dyson, Bernard Sadoulet, J. Eric Bower, Warren Y.-C. Lai, William M. Mansfield, J. Ashley Taylor

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Proceedings Volume 5719, MOEMS and Miniaturized Systems V; (2005) https://doi.org/10.1117/12.593234
Event: MOEMS-MEMS Micro and Nanofabrication, 2005, San Jose, California, United States

Abstract

Membrane deformable mirror devices consist of a single large membrane that is suspended above an array of actuating electrodes. A transparent electrode is incorporated into the membrane mirror device in the optical path in an effort to provide significantly greater control of the membrane, and hence improved performance in an adaptive optics system. The devices presented here were fabricated from 1 mm thickness SOI; devices were bonded to electrode arrays with 1024 electrodes, packaged in ceramic pin grid arrays and driven by off chip D/A electronics. The transparent electrodes consist of glass that is ITO coated for electrical conductivity and visible light transmission. An electrode is inserted into a recessed cavity of each membrane chip, and is positioned 70 mm above the membrane. With 2x2 binned electrodes, the device demonstrates 10 mm deflection toward the electrode array at 40 V. Large deflection at low voltage is obtained because of the low intrinsic stress of the silicon membrane. These data also demonstrate modest deflection toward the transparent electrode, which may be improved with better alignment of the transparent electrode with the underlying membrane and electrode array in future devices.

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Peter L. Kurczynski, Harold M. Dyson, Bernard Sadoulet, J. Eric Bower, Warren Y.-C. Lai, William M. Mansfield, and J. Ashley Taylor "A membrane mirror with transparent electrode for adaptive optics", Proc. SPIE 5719, MOEMS and Miniaturized Systems V, (22 January 2005); https://doi.org/10.1117/12.593234

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