High-resolution 3D OCT imaging with a MEMS scanning endoscope

Li S. Fan; Wibool Piyawattanametha; Ming C. Wu; Aaron D. Aguirre; Paul R. Herz; Yu Chen; James G. Fujimoto

doi:10.1117/12.600089

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22 January 2005 High-resolution 3D OCT imaging with a MEMS scanning endoscope

Li S. Fan, Wibool Piyawattanametha, Ming C. Wu, Aaron D. Aguirre, Paul R. Herz, Yu Chen, James G. Fujimoto

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Proceedings Volume 5719, MOEMS and Miniaturized Systems V; (2005) https://doi.org/10.1117/12.600089
Event: MOEMS-MEMS Micro and Nanofabrication, 2005, San Jose, California, United States

Abstract

Three-dimensional imaging is achieved by optical coherence tomography (OCT) integrated with a two-axis MEMS scanner to enable noninvasive volume imaging of biological tissues. The longitudinal scan is obtained by optical coherence interferometry. The transverse scan is obtained by tilting the two-axis MEMS mirror to scan the optical beam across the target. High-resolution OCT imaging has enabled in vivo observation of tissue architectural layers and differentiation of normal from tumor lesions within the human gastrointestinal tract. MEMS scanner based catheters with distal beam scanning can image with higher speed, precision, and repeatability than conventional linear scanning catheters. In this work, a 1-mm diameter MEMS scanning mirror with collimator and focusing optics is integrated into a compact 5-mm diameter package that is compatible with limited space in the endoscope. A large fill factor mirror provides high aperture over large scan angle and frequencies of hundreds of Hz in both axes. Using a broadband femtosecond laser light source, high axial image resolution of ~5 um is achieved at 1.06 um wavelength. Transverse resolution of ~ 12-um is demonstrated for cross-sectional image with the endoscope.

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Li S. Fan, Wibool Piyawattanametha, Ming C. Wu, Aaron D. Aguirre, Paul R. Herz, Yu Chen, and James G. Fujimoto "High-resolution 3D OCT imaging with a MEMS scanning endoscope", Proc. SPIE 5719, MOEMS and Miniaturized Systems V, (22 January 2005); https://doi.org/10.1117/12.600089

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