Young's module control of the microcantilever made by micro-stereolithography

Masafumi Miwa; Kazutika Douoka; Satoru Yoneyama; S. Tuchitani; Y. Kosihmoto; R. Kaneko

doi:10.1117/12.589197

22 January 2005 Young's module control of the microcantilever made by micro-stereolithography

Masafumi Miwa, Kazutika Douoka, Satoru Yoneyama, S. Tuchitani, Y. Kosihmoto, R. Kaneko

Proceedings Volume 5719, MOEMS and Miniaturized Systems V; (2005) https://doi.org/10.1117/12.589197
Event: MOEMS-MEMS Micro and Nanofabrication, 2005, San Jose, California, United States

Abstract

It is important to know mechanical properties of micro structures fabricated as a micro machine component by micro-stereolithgraphy(mSL). We developed new measurement equipment and measured Young's modules of micro cantilevers fabricated by mSL. Sample micro cantilevers were formed by changing irradiation laser power of mSL system and postcure processing time. We put load on the sample cantilever, then measured the relation between load and deflection of the cantilever. The young's modules of samples were calculated from the gradient of measured Load-Defection relation and the formula of strength of material. As the result, the young's module of cantilever made by mSL is depended on irradiation laser power. And the value increases by postcure which makes progress of un-cured part polymerization in the cantilever. Although the increased values are also depended on irradiate laser power.

Citation Download Citation

Masafumi Miwa, Kazutika Douoka, Satoru Yoneyama, S. Tuchitani, Y. Kosihmoto, and R. Kaneko "Young's module control of the microcantilever made by micro-stereolithography", Proc. SPIE 5719, MOEMS and Miniaturized Systems V, (22 January 2005); https://doi.org/10.1117/12.589197

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