CAD-integrated system for automated multi-photon three-dimensional micro- and nano-fabrication

Ivan B. Divliansky; Gregory Weaver; Michael Petrovich; Toufic Jabbour; Hubert P. Seigneur; Caleb Parnell-Lampen; Amy Thompson; Kevin D. Belfield; Stephen M. Kuebler

doi:10.1117/12.601187

22 January 2005 CAD-integrated system for automated multi-photon three-dimensional micro- and nano-fabrication

Ivan B. Divliansky, Gregory Weaver, Michael Petrovich, Toufic Jabbour, Hubert P. Seigneur, Caleb Parnell-Lampen, Amy Thompson, Kevin D. Belfield, Stephen M. Kuebler

Author Affiliations +

Proceedings Volume 5720, Micromachining Technology for Micro-Optics and Nano-Optics III; (2005) https://doi.org/10.1117/12.601187
Event: MOEMS-MEMS Micro and Nanofabrication, 2005, San Jose, California, United States

Abstract

Multi-photon three-dimensional micro-/nano-fabrication (3DM) is a powerful technique for creating complex 3D micro-scale structures of the type needed for micro-electromechanical systems (MEMS), micro-optics, and microfluidics. In 3DM high peak-power laser pulses are tightly focused into a medium which undergoes a physical or chemical change following multi-photon excitation at the focal point. Complex structures are generated by serial 3D-patterned exposure within the material volume. To further the application of 3DM to micro-component engineering, we are developing a fully automated and integrated 3DM system capable of creating complex cross-linked polymer structures based on patterns designed in a CAD environment. The system consists of four major components: (1) a femtosecond laser and opto-mechanical system; (2) 3-axis micro-positioner; (3) a computer-controlled fabrication interface; and (4) software for fabrication-path planning. The path-planning software generates a 3DM command sequence based on an object-design input file created using standard commercial CAD software. The 3DM system can be used for start-to-finish design and fabrication of waveguides, 3D photonic crystals, and other complex micro-structures. These results demonstrate a technological path for implementing 3DM as a tool for micro- and nano-optical component manufacture.

Citation Download Citation

Ivan B. Divliansky, Gregory Weaver, Michael Petrovich, Toufic Jabbour, Hubert P. Seigneur, Caleb Parnell-Lampen, Amy Thompson, Kevin D. Belfield, and Stephen M. Kuebler "CAD-integrated system for automated multi-photon three-dimensional micro- and nano-fabrication", Proc. SPIE 5720, Micromachining Technology for Micro-Optics and Nano-Optics III, (22 January 2005); https://doi.org/10.1117/12.601187

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available