Micromachined capacitive transducer arrays for intravascular ultrasound

F. Levent Degertekin; R. Oytun Guldiken; Mustafa Karaman

doi:10.1117/12.596021

22 January 2005 Micromachined capacitive transducer arrays for intravascular ultrasound

F. Levent Degertekin, R. Oytun Guldiken, Mustafa Karaman

Proceedings Volume 5721, MOEMS Display and Imaging Systems III; (2005) https://doi.org/10.1117/12.596021
Event: MOEMS-MEMS Micro and Nanofabrication, 2005, San Jose, California, United States

Abstract

Intravascular ultrasound (IVUS) imaging has become an essential imaging modality for the effective diagnosis and treatment of cardiovascular diseases during the past decade enabled by innovative applications of piezoelectric transducer technology. The limitations in the manufacture and performance of the same piezoelectric transducers have also impeded the improvement of IVUS for emerging clinically important applications such as forward viewing arrays for guiding interventions and high resolution imaging of arterial structure such as vulnerable plaque and fibrous cap, and also implementation of techniques such as harmonic imaging of the tissue and of the contrast agents. Capacitive micromachined ultrasonic transducer (CMUT) technology shows great potential for transforming IVUS not only to satisfy these clinical needs but also to open up possibilities for low-cost imaging devices integrated to therapeutic tools. We have developed manufacturing processes with a maximum process temperature of 250°C to build CMUTs on the same silicon chip with integrated electronics. Using these processes we fabricated CMUT arrays suitable for forward viewing IVUS in the 10-20MHz range. We characterized these array elements in terms of pulse-echo response, radiation pattern measurements and demonstrated its volumetric imaging capabilities on various imaging targets.

Citation Download Citation

F. Levent Degertekin, R. Oytun Guldiken, and Mustafa Karaman "Micromachined capacitive transducer arrays for intravascular ultrasound", Proc. SPIE 5721, MOEMS Display and Imaging Systems III, (22 January 2005); https://doi.org/10.1117/12.596021

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