Polyimide MEMS actuators for medical imaging

Jason M. Zara; Patrick Mills; Paul Patterson

doi:10.1117/12.593663

22 January 2005 Polyimide MEMS actuators for medical imaging

Jason M. Zara, Patrick Mills, Paul Patterson

Proceedings Volume 5721, MOEMS Display and Imaging Systems III; (2005) https://doi.org/10.1117/12.593663
Event: MOEMS-MEMS Micro and Nanofabrication, 2005, San Jose, California, United States

Abstract

This paper provides an overview of several years of research in the use of polyimide MEMS actuators for medical imaging applications, including high frequency ultrasound and optical coherence tomography (OCT). These scanning devices are microfabricated out of polyimide substrates using conventional integrated circuit technology. The material properties of the polyimide allow very large scan angles to be realized and also allow the resonant frequencies of the structures to be in the appropriate ranges for real-time imaging. The primary application of these probes is endoscopic and catheter-based imaging procedures. The microfabrication enables the creation of very small devices essential for compact imaging probes. In addition, they can be fabricated in bulk, reducing their cost and potentially making them disposable to reduce the cost of patient care and minimize the potential for patient cross-contamination. Several different scanning geometries and actuators have been investigated for imaging applications, including both forward-viewing and side-scanning configurations. Probes that utilize both electrostatic polyimide actuators and piezoelectric bimorphs to mechanically scan the ultrasound or OCT imaging beams will be presented. These probes have been developed for both use in both ultrasound and OCT imaging systems. Medical applications of these probes include the early detection of cancerous and precancerous conditions in the bladder and other mucosal tissues. These imaging probes will allow the physician to visualize the subsurface microstructure of the tissues and detect abnormalities not visible through the use of conventional endoscopic imaging techniques. Prototype devices have been used to image geometric wire phantoms, in vitro porcine tissue, and in vivo subjects. The progress made over the last several years in the development of these polyimide scanning probes will be presented.

Citation Download Citation

Jason M. Zara, Patrick Mills, and Paul Patterson "Polyimide MEMS actuators for medical imaging", Proc. SPIE 5721, MOEMS Display and Imaging Systems III, (22 January 2005); https://doi.org/10.1117/12.593663

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