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7 April 2005 Hyperspectral imaging with MEMs integrated focal plane arrays
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Hyperspectral imaging has been receiving much attention for its potential for high-resolution imaging and target recognition, chemical analysis and spectroscopy. In target recognition, identifying targets in cluttered and partially obscured environments requires the analysis of spectral content of the scenery. Spectroscopy type of applications can benefit from the real-time data collection of spatial and spectral content in a single image capture. We report on the design, simulation and fabrication of integrating MEMs tunable Fabry-Perot etalon filters with 2 dimensional InGaAs focal plane arrays for simultaneous spectral and spatial imaging. By tuning the transmission wavelength of the MEMs based filter, the spectral information is provided at each pixel of the photodiode array. The MEMs device is based on two InP/air-gap DBR reflectors, and a single wavelength air cavity that separates them. The selective etching of InGaAs forms the air gaps that suspend the quarter wavelength InP reflector layers. The top mirror reflectivity as well as the cavity air-gap is tuned by deflecting the suspended InP layer through a reverse biased p-i-n junction. Due to the high refractive index contrast of InP and air, the spectral width of the DBR reflectors is wide enough to block transmitted light from 1000nm to 1700nm, allowing the InGaAs absorber layer to detect only the MEMs filtered spectral content. A theoretical study on wide tuning range designs and the expected FWHM will be presented.
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Bora M. Onat, Navneet Masaun, Wei Huang, Michael Lange, and Chris Dries "Hyperspectral imaging with MEMs integrated focal plane arrays", Proc. SPIE 5726, Semiconductor Photodetectors II, (7 April 2005);

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