Fabrication of high-Tc superconducting hot electron bolometers for terahertz mixer applications

Jean-Claude Villegier; Annick F. Degardin; Bruno Guillet; Frederic Houze; Alain J. Kreisler; Michel Chaubet

doi:10.1117/12.592106

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25 March 2005 Fabrication of high-Tc superconducting hot electron bolometers for terahertz mixer applications

Jean-Claude Villegier, Annick F. Degardin, Bruno Guillet, Frederic Houze, Alain J. Kreisler, Michel Chaubet

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Proceedings Volume 5727, Terahertz and Gigahertz Electronics and Photonics IV; (2005) https://doi.org/10.1117/12.592106
Event: Integrated Optoelectronic Devices 2005, 2005, San Jose, California, United States

Abstract

Superconducting Hot Electron Bolometer (HEB) mixers are a competitive alternative to Schottky diode mixers or other conventional superconducting receiver technologies in the terahertz frequency range because of their ultrawide bandwidth (from millimeter waves to the visible), high conversion gain, and low intrinsic noise level, even at 77 K. A new technological process has been developed to realize HEB mixers based on high temperature superconducting materials, using 15 to 40 nm thick layers of YBa₂Cu₃O_7-δ (YBCO), sputtered on MgO (100) substrates by hollow cathode magnetron sputtering. Critical temperature values of YBCO films were found in the 85 to 91 K range. Sub-micron HEB bridges (0.8 μm x 0.8 μm) were obtained by combining electronic and UV lithography followed by selective etching techniques. Realization of YBCO HEB coupling to planar integrated gold antennas was also considered.

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Jean-Claude Villegier, Annick F. Degardin, Bruno Guillet, Frederic Houze, Alain J. Kreisler, and Michel Chaubet "Fabrication of high-Tc superconducting hot electron bolometers for terahertz mixer applications", Proc. SPIE 5727, Terahertz and Gigahertz Electronics and Photonics IV, (25 March 2005); https://doi.org/10.1117/12.592106

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