Fabrication and characterization of tightly confining AlGaAs waveguides and microcavities for nonlinear optical applications

Luigi Scaccabarozzi; Zheng Wang; Xiaojun Yu; Meredith Marie Lee; Wah Tung Lau; Mehmet Fatih Yanik; Shanhui Fan; Martin M. Fejer; James S. Harris Jr.

doi:10.1117/12.591174

31 March 2005 Fabrication and characterization of tightly confining AlGaAs waveguides and microcavities for nonlinear optical applications

Luigi Scaccabarozzi, Zheng Wang, Xiaojun Yu, Meredith Marie Lee, Wah Tung Lau, Mehmet Fatih Yanik, Shanhui Fan, Martin M. Fejer, James S. Harris Jr.

Author Affiliations +

Proceedings Volume 5728, Integrated Optics: Devices, Materials, and Technologies IX; (2005) https://doi.org/10.1117/12.591174
Event: Integrated Optoelectronic Devices 2005, 2005, San Jose, California, United States

Abstract

For applications such as fiber optic networks, wavelength conversion, or extracting information from a predetermined channel, are required operations. All-optical systems, based on non-linear optical frequency conversion, offer advantages compared to present systems based on optical-electronic-optical (OEO) conversion. Thanks to the large nonlinear susceptibility of AlGaAs (d14 = 90pm/V) and mature device fabrication technologies, quasi-phasematched non-linear interactions in orientation-patterned AlGaAs waveguides for optical wavelength conversion have already been demonstrated. However, they require long interaction length (~ centimeters) and a complex fabrication process. Moreover, the conversion efficiency remains relatively low, due to losses and poor confinement. We present here the design and fabrication of a very compact (~ tens of microns long) device based on tightly confining waveguides and photonic crystal microcavities. Our device is inherently phase-matched due to the short length and should significantly increase the conversion efficiency due to tight confinement and high cavity-Q value. We characterized the waveguides, measuring the propagation loss by the Fabry-Perot method and by a variant of the cutback method, and both give a consistent loss value (~5 dB/mm for single-mode waveguides and ~3 dB/mm for multimode waveguide). We also characterized the microcavities measuring the transmission spectrum and the cavity-Q value, obtaining Q's as large as 700.

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Luigi Scaccabarozzi, Zheng Wang, Xiaojun Yu, Meredith Marie Lee, Wah Tung Lau, Mehmet Fatih Yanik, Shanhui Fan, Martin M. Fejer, and James S. Harris Jr. "Fabrication and characterization of tightly confining AlGaAs waveguides and microcavities for nonlinear optical applications", Proc. SPIE 5728, Integrated Optics: Devices, Materials, and Technologies IX, (31 March 2005); https://doi.org/10.1117/12.591174

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KEYWORDS

Waveguides

Optical microcavities

Chromium

Fabry–Perot interferometers

Nonlinear optics

Etching

Aluminum

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