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31 March 2005 High-Q microring resonator for biochemical sensors
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The large refractive index difference between silicon nitride and silicon dioxide allows silicon nitride/dioxide waveguides to have a small mode size and low radiation bending loss. Low radiation bending loss enables high quality (Q) factor microring resonators. In this paper, we will present a record high quality factor microring resonator using silicon nitride and silicon dioxide on a silicon wafer. The microring resonator was fabricated using a deep UV photolithography and etching process. The microring resonator was critically coupled to a straight waveguide. An intrinsic quality factor of 240,000 has been measured. We will also present our result of using on-chip high-Q microring resonators for liquid phase chemical sensing application.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Junpeng Guo, Michael J. Shaw, G. Allen Vawter, G. Ronald Hadley, Peter Esherick, and Charles T. Sullivan "High-Q microring resonator for biochemical sensors", Proc. SPIE 5728, Integrated Optics: Devices, Materials, and Technologies IX, (31 March 2005);

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