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25 March 2005 Design and analysis of small-area air trench bends and splitters
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High efficiency small-area waveguide bends and splitters for perfluorocyclobutane (PFCB) copolymer materials have been designed with air trench structures (ATSs). An air trench at the intersection of one input and two output waveguides can function as a high efficiency splitter. High efficiency small-area waveguide bends are achieved by placing ATSs at the waveguide bend corners and operate through total internal reflection (TIR). In this paper we discuss bends and splitters that are designed specifically for constructing a ring resonator and a Mach-Zender interferometer. Two dimensional (2-D) finite difference time domain (FDTD) analysis has been used for design. In order to further examine the performance of realistic small-area air trench bend structures, we have also employed three dimensional (3-D) FDTD. From 3-D FDTD simulation results, we find that the 2-D designs are representative of actual devices. By combining small-area air trench bends and splitters, we show how a compact ring resonator can be realized. Simulation results show attractive properties for the proposed ring resonator design. Preliminary ATS etch results of PFCB with CO and O2 shows the possibility of fabricating the proposed devices.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Seunghyun Kim, Jaime Cardenas, Nazli Rahmanian, Jingbo Cai, Jianhua Jiang, and Gregory P. Nordin "Design and analysis of small-area air trench bends and splitters", Proc. SPIE 5729, Optoelectronic Integrated Circuits VII, (25 March 2005);


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