Translator Disclaimer
Paper
25 March 2005 Carbon nanotube technologies for future ULSI via interconnects
Author Affiliations +
Abstract
We demonstrate the advantages of carbon nanotubes (CNTs) for ULSI interconnections, which we believe that it must be one of the most promising applications for metallic carbon nanotubes. We report present status of CNT material technologies and the potential of metallic CNT vias for future ULSI interconnections.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yuji Awano "Carbon nanotube technologies for future ULSI via interconnects", Proc. SPIE 5732, Quantum Sensing and Nanophotonic Devices II, (25 March 2005); https://doi.org/10.1117/12.580083
PROCEEDINGS
8 PAGES


SHARE
Advertisement
Advertisement
Back to Top