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20 April 2005 Performance tests on a-Si TFT arrays for flat panel digital x-ray detectors
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We report on a set of tests that measure the performance of a-Si flat panel TFT arrays used in digital x-ray detectors. During production of high performance TFT panels for applications such as mammography it is important to verify the integrity and quality of the TFT array at progressive stages of production. Early identification of failing TFT arrays as well as continuous monitoring of the production process can result in early termination of poor quality panels, quick identification of the root cause of failures, and correction of process drift to prevent failures from occurring. We present results of a system designed to test the performance of a-Si TFT arrays during the production process. Metrics which are important to x-ray image quality were tested, including FET performance, pixel capacitance, storage capacitor lag and diode leakage. Functional tests were performed entirely on pixels in the imaging array using timing and biasing conditions that mimic x-ray illumination.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A. Couture, D. Albagli, G. Possin, H. Hudspeth, P. Janiszewski, M. Zoeller, and P. Granfors "Performance tests on a-Si TFT arrays for flat panel digital x-ray detectors", Proc. SPIE 5745, Medical Imaging 2005: Physics of Medical Imaging, (20 April 2005);

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