Defect printability and defect inspection simulations of patterned EUVL mask using rigorous coupled-wave analysis

Seong-Sue Kim; Roman Chalyck; Sang-Gyun Woo; Han-Ku Cho

doi:10.1117/12.600459

6 May 2005 Defect printability and defect inspection simulations of patterned EUVL mask using rigorous coupled-wave analysis

Seong-Sue Kim, Roman Chalyck, Sang-Gyun Woo, Han-Ku Cho

Author Affiliations +

Proceedings Volume 5751, Emerging Lithographic Technologies IX; (2005) https://doi.org/10.1117/12.600459
Event: Microlithography 2005, 2005, San Jose, California, United States

Abstract

Rigorous coupled-wave analysis(RCWA) is applied to computing near-field of mask scattered by patterned absorber and defects buried in Mo/Si multilayer. Especially, a method of modeling phase defect for application of RCWA is provided, which transforms the multilayer structure deformed by defect into straight multilayer structure with inhomogeneous dielectric constant. This mask near-field is used to get the aerial image as well as mask inspection image of confocal microscope. Using these simulation methods, printability of both phase and amplitude defect are investigated over various size of defect. This study shows that the change in critical dimension(CD) of line and space pattern increases linearly with defect height of phase defect, while increases nonlinearly with that of amplitude defect. A modeling of confocal microscopy is also shown with an example of actinic inspection simulation.

Citation Download Citation

Seong-Sue Kim, Roman Chalyck, Sang-Gyun Woo, and Han-Ku Cho "Defect printability and defect inspection simulations of patterned EUVL mask using rigorous coupled-wave analysis", Proc. SPIE 5751, Emerging Lithographic Technologies IX, (6 May 2005); https://doi.org/10.1117/12.600459

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available