Investigation of plasma-induced erosion of multilayer condenser optics

Richard J. Anderson; Dean A. Buchenauer; K. A. Williams; W. M. Clift; L. E. Klebanoff; N. V. Edwards; O. R. Wood II; S. Wurm

doi:10.1117/12.599859

6 May 2005 Investigation of plasma-induced erosion of multilayer condenser optics

Richard J. Anderson, Dean A. Buchenauer, K. A. Williams, W. M. Clift, L. E. Klebanoff, N. V. Edwards, O. R. Wood II, S. Wurm

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Proceedings Volume 5751, Emerging Lithographic Technologies IX; (2005) https://doi.org/10.1117/12.599859
Event: Microlithography 2005, 2005, San Jose, California, United States

Abstract

Experiments are presented that investigate the mechanistic cause of multilayer erosion observed from condenser optics exposed to EUV laser-produced plasma (LPP) sources. Using a Xe filament jet source excited with Nd-YAG laser radiation (300 mJ/pulse), measurements were made of material erosion from Au, Mo, Si and C using coated quartz microbalances located 127 mm from the plasma. The observed erosion rates were as follows: Au=99nm/106 shots, Mo= 26nm/106 shots, Si=19nm/106 shots, and C=6nm/106 shots. The relative ratio Au:Mo:Si:C of erosion rates observed experimentally, 16:4:3:1 compares favorably with that predicted from an atomic sputtering model assuming 20 kV Xe ions, 16:6:4:1. The relative agreement indicates that Xe-substrate sputtering is largely responsible for the erosion of Mo/Si multilayers on condenser optics that directly face the plasma. Time-of-flight Faraday cup measurements reveal the emission of high energy Xe ions from the Xe-filament jet plasma. The erosion rate does not depend on the repetition rate of the laser, suggesting a thermal mechanism is not operative. The Xe-filament jet erosion is ~20x that observed from a Xe spray jet. Since the long-lived (millisecond time scale) plasma emanating from these two sources are the same to within ~30%, sputtering from this long-lived plasma can be ruled out as an erosion agent.

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Richard J. Anderson, Dean A. Buchenauer, K. A. Williams, W. M. Clift, L. E. Klebanoff, N. V. Edwards, O. R. Wood II, and S. Wurm "Investigation of plasma-induced erosion of multilayer condenser optics", Proc. SPIE 5751, Emerging Lithographic Technologies IX, (6 May 2005); https://doi.org/10.1117/12.599859

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