Surface engineering for resolution enhancement in nanoimprint lithography

G. Y. Jung; W. Wu; Z. Li; S. Y. Wang; William M. Tong; R. Stanley Williams

doi:10.1117/12.599793

6 May 2005 Surface engineering for resolution enhancement in nanoimprint lithography

G. Y. Jung, W. Wu, Z. Li, S. Y. Wang, William M. Tong, R. Stanley Williams

Proceedings Volume 5751, Emerging Lithographic Technologies IX; (2005) https://doi.org/10.1117/12.599793
Event: Microlithography 2005, 2005, San Jose, California, United States

Abstract

Nanoimprinting lithography was initiated as an alternative way to achieve nanoscale structures with high throughput and low cost. We have developed a UV-nanoimprint process to fabricate 34x34 crossbar circuits with a half-pitch of 50 nm (equivalent to a bit density of 10 Gbit/cm²). Our resist was of a single layer, which required fewer processing steps than any bi-layer process, but yielded high quality results. By engineering the surface energy of the substrate, we also eliminated the problem of trapped air during contact with the mold due to non-conformal contact such that it spreads the resist and expels trapped air. Resist adhesion to the gaps between features in the mold during mold separation is a challenge that becomes more severe as the pitch size shrinks. We have improved the resist adhesion to the substrate by applying a monolayer of surface linker molecule on the substrate surface. The surface linker bonded the resist to the substrate surface chemically and produced fine imprinted patterns at 30 nm hp.

Citation Download Citation

G. Y. Jung, W. Wu, Z. Li, S. Y. Wang, William M. Tong, and R. Stanley Williams "Surface engineering for resolution enhancement in nanoimprint lithography", Proc. SPIE 5751, Emerging Lithographic Technologies IX, (6 May 2005); https://doi.org/10.1117/12.599793

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available