In field overlay uncertainty contributors

Aviv Frommer; Elyakim Kassel; Pavel Izikson; Mike Adel; Philippe Leray; Bernd Schulz

doi:10.1117/12.599397

10 May 2005 In field overlay uncertainty contributors

Aviv Frommer, Elyakim Kassel, Pavel Izikson, Mike Adel, Philippe Leray, Bernd Schulz

Proceedings Volume 5752, Metrology, Inspection, and Process Control for Microlithography XIX; (2005) https://doi.org/10.1117/12.599397
Event: Microlithography 2005, 2005, San Jose, California, United States

Abstract

In this publication, the contributors to in-field overlay metrology uncertainty have been parsed and quantified in a specific case study. Particular focus is placed on the unmodeled systematics, i.e. the components which contribute to residuals in a linear model after removal of random errors. These are the contributors which are often the most challenging to quantify and are suspected to be significant in the model residuals. The results show that even in a relatively "clean" front end process, the unmodeled systematics are the dominant residual contributor, accounting for 60 to 70% of the variance. Given the above results, new sampling and modeling methods are proposed which have the potential to improve the accuracy of modeled correctibles and lot dispositioning parameters.

Citation Download Citation

Aviv Frommer, Elyakim Kassel, Pavel Izikson, Mike Adel, Philippe Leray, and Bernd Schulz "In field overlay uncertainty contributors", Proc. SPIE 5752, Metrology, Inspection, and Process Control for Microlithography XIX, (10 May 2005); https://doi.org/10.1117/12.599397

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available