Nano-imaging with compact extreme ultraviolet laser sources

G. Vaschenko; F. Brizuela; C. Brewer; M. Grisham; Y. Wang; M. A. Larotonda; B. M. Luther; C. S. Menoni; M. Marconi; J. J. Rocca; W. L. Chao; J. A. Liddle; E. H. Anderson; D. T. Attwood; A. V. Vinogradov; I. A. Artioukov; Y. P. Pershyn; V. V. Kondratenko

doi:10.1117/12.601899

10 May 2005 Nano-imaging with compact extreme ultraviolet laser sources

G. Vaschenko, F. Brizuela, C. Brewer, M. Grisham, Y. Wang, M. A. Larotonda, B. M. Luther, C. S. Menoni, M. Marconi, J. J. Rocca, W. L. Chao, J. A. Liddle, E. H. Anderson, D. T. Attwood, A. V. Vinogradov, I. A. Artioukov, Y. P. Pershyn, V. V. Kondratenko

Author Affiliations +

Proceedings Volume 5752, Metrology, Inspection, and Process Control for Microlithography XIX; (2005) https://doi.org/10.1117/12.601899
Event: Microlithography 2005, 2005, San Jose, California, United States

Abstract

We report high resolution imaging results obtained utilizing small-scale extreme ultraviolet laser sources. A compact capillary-discharge pumped Ne-like Ar laser emitting at a wavelength of 46.9 nm was used to demonstrate imaging with nanometer-scale resolution in transmission and reflection modes. We exploited the large photon fluence of this short wavelength laser to obtain high-resolution images with exposure times as short as 1-10 seconds. Images with a spatial resolution better than 140 nm were obtained using the combination of a Sc/Si multilayer coated Schwarzschild condenser and free-standing objective zone plate. Preliminary results of imaging with a 13.9 nm extreme ultraviolet laser light are also discussed.

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G. Vaschenko, F. Brizuela, C. Brewer, M. Grisham, Y. Wang, M. A. Larotonda, B. M. Luther, C. S. Menoni, M. Marconi, J. J. Rocca, W. L. Chao, J. A. Liddle, E. H. Anderson, D. T. Attwood, A. V. Vinogradov, I. A. Artioukov, Y. P. Pershyn, and V. V. Kondratenko "Nano-imaging with compact extreme ultraviolet laser sources", Proc. SPIE 5752, Metrology, Inspection, and Process Control for Microlithography XIX, (10 May 2005); https://doi.org/10.1117/12.601899

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