Improvement of homogeneity in large optics made of Corning HPFS fused silica

Julie L. Ladison; John E. Maxon

doi:10.1117/12.601036

12 May 2005 Improvement of homogeneity in large optics made of Corning HPFS fused silica

Julie L. Ladison, John E. Maxon

Proceedings Volume 5754, Optical Microlithography XVIII; (2005) https://doi.org/10.1117/12.601036
Event: Microlithography 2005, 2005, San Jose, California, United States

Abstract

In large fused silica blanks, typically greater than 225mm in diameter and 40mm thick, recent glass forming improvements have improved the homogeneity in Corning HPFS fused silica by 51%. Overall homogeneity peak to valley values improved from an average 1.4ppm to 0.69ppm. This paper describes the experimental results on homogeneity and birefringence resulting from these Forming improvements.

Citation Download Citation

Julie L. Ladison and John E. Maxon "Improvement of homogeneity in large optics made of Corning HPFS fused silica", Proc. SPIE 5754, Optical Microlithography XVIII, (12 May 2005); https://doi.org/10.1117/12.601036

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