Modeling of electromagnetic effects from mask topography at full-chip scale

Konstantinos Adam

doi:10.1117/12.600139

12 May 2005 Modeling of electromagnetic effects from mask topography at full-chip scale

Konstantinos Adam

Proceedings Volume 5754, Optical Microlithography XVIII; (2005) https://doi.org/10.1117/12.600139
Event: Microlithography 2005, 2005, San Jose, California, United States

Abstract

Polarization and other complex electromagnetic effects that arise because of mask topography are becoming increasingly more important to model. Commercial lithography simulation tools that operate on small layout areas of order 1-10μm² have advanced models requiring solution of Maxwell’s three-dimensional boundary problem. However, this technique is not viable for full-chip modeling. Here, we show results that demonstrate the accuracy of domain decomposition method adapted for full-chip modeling of mask topography effects. The intensity error relative to the complete 3D solution is shown to be < 3%.

Citation Download Citation

Konstantinos Adam "Modeling of electromagnetic effects from mask topography at full-chip scale", Proc. SPIE 5754, Optical Microlithography XVIII, (12 May 2005); https://doi.org/10.1117/12.600139

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