Paper
16 May 2005 An innovative all-polymeric drug-supply device
Cheng Luo, Xinchuan Liu, Rakesh Poddar, John Garra, Aand P. Gadre, Edward V. Keuren, Thomas Schneider, Robert White, John Currie, Makarand Paranjape
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Abstract
In this paper, we report an innovative all-polymeric drug-supply device. The micro outlet of the device was ablated through a polymethyl methacrylate (PMMA) layer using a microheater. The size of the ablated micropore was mainly related to the heater temperature profile, and the molten PMMA took the gold heater lines away from the pore area, avoiding possible block of the gold lines to the flow out of the pore. Simulation was conducted to find the temperature profile on the surface of the microheater, and experimental results have a good match with simulation results.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Cheng Luo, Xinchuan Liu, Rakesh Poddar, John Garra, Aand P. Gadre, Edward V. Keuren, Thomas Schneider, Robert White, John Currie, and Makarand Paranjape "An innovative all-polymeric drug-supply device", Proc. SPIE 5763, Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (16 May 2005); https://doi.org/10.1117/12.600337
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KEYWORDS
Polymethylmethacrylate

Gold

Glasses

Resistance

Reactive ion etching

Microelectromechanical systems

Etching

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