Analysis and design of a self-powered piezoelectric microaccelerometer

Wenli Zhou; Wei-Hsin Liao; Wen J. Li

doi:10.1117/12.601131

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16 May 2005 Analysis and design of a self-powered piezoelectric microaccelerometer

Wenli Zhou, Wei-Hsin Liao, Wen J. Li

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Proceedings Volume 5763, Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology; (2005) https://doi.org/10.1117/12.601131
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2005, San Diego, California, United States

Abstract

Power consumption is a critical concern of many sensors used in diversified applications, especially where the replacement of batteries is impossible or inconvenient. Strain energy harvesting technique is an attractive approach to solve this problem using piezoelectric materials. The feasibility of a self-powered piezoelectric microaccelerometer system using lead zirconate titanate (PZT) thin film is studied in this paper. Since the electromechanical coefficient d₃₃ of PZT is larger than d₃₁, and the transverse (33 mode) mode is also easier to fabricate, our design and analysis are focused on the transverse mode in constructing the PZT-based self-powered microsystem. The PZT-based cantilever structure with interdigitated electrodes and silicon seismic mass at the free end are designed to have specific resonance frequencies ranging from tens to thousands of hertz. The capability of energy storage and acceleration sensitivity in the proposed microaccelerometer are concurrently evaluated. A trade-off exists between these two major functions and the desirable operating frequency of the proposed system, i.e., the compromise depends on the demands of particular applications.

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Wenli Zhou, Wei-Hsin Liao, and Wen J. Li "Analysis and design of a self-powered piezoelectric microaccelerometer", Proc. SPIE 5763, Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (16 May 2005); https://doi.org/10.1117/12.601131

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