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16 May 2005 High-performance sensor platform based on electroactive polymers
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Abstract
The performance of new biosensor design -- Micro-ElectroMechanical Diaphragm (MEMD) -- made from PVDF piezoelectric polymer is reported. The resonant frequencies changing with featured size of MEMD are characterized. The resonant behavior in liquid media shows that the damping effect of MEMD is lower than that of MC. Yeast cell detection demonstrated the feasibility of using this platform as biosensor in real time detection. Finally, the preliminary study on microelectronic fabrication of MEMD is presented.
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Zhimin Li, Suiqiong Li, and Z.-Y. Cheng "High-performance sensor platform based on electroactive polymers", Proc. SPIE 5763, Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (16 May 2005); https://doi.org/10.1117/12.598854
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