Integrated cantilever fabrication and system development for ultrasonic and acoustic scanning probe microscopy

Stephen Olson; Balasubramanian Sankaran; Bruce Altemus; Bai Xu; Robert Geer

doi:10.1117/12.607770

9 May 2005 Integrated cantilever fabrication and system development for ultrasonic and acoustic scanning probe microscopy

Stephen Olson, Balasubramanian Sankaran, Bruce Altemus, Bai Xu, Robert Geer

Author Affiliations +

Proceedings Volume 5766, Testing, Reliability, and Application of Micro- and Nano-Material Systems III; (2005) https://doi.org/10.1117/12.607770
Event: Nondestructive Evaluation for Health Monitoring and Diagnostics, 2005, San Diego, CA, United States

Abstract

Although the conventional optical lever technology typically used for scanning probe microscope applications has proven highly sensitive, accurate, and cost effective for most applications involving micromachined cantilever deflection measurements, frequency limitations and space needs limit its applicability to emerging ultrasonic-based SPM applications. Recently, the fabrication of cantilevers integrated with actuation and sensing components has opened avenues for feedback-based driving of micromachined cantilevers at higher-order resonance frequencies while sensing average deflection without the need for an optical deflection pathway for average deflection sensing. The work presented here will review recent efforts by our group in fabricating micromachined cantilevers with integrated piezoresistive deflection-sensing components combined with integrated ZnO actuation layers to induce cantilever deflection. These cantilevers are being fabricated for use in a heterodyne force microscopy system (HFM) to enable SPM imaging contrast based on viscoelastic response of a surface in contact with a micromachined tip wherein active-feedback technology is being applied to maintain ultrasonic tip excitation at higher order cantilever resonances. The first and second-pass fabrication results will be presented and reviewed regarding cantilever release and ZnO actuator (and electrode) fabrication. Dynamic response data from these structures, measured via laser Doppler vibrometery reveal the expected resonance structure for a cantilever of these dimensions.

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Stephen Olson, Balasubramanian Sankaran, Bruce Altemus, Bai Xu, and Robert Geer "Integrated cantilever fabrication and system development for ultrasonic and acoustic scanning probe microscopy", Proc. SPIE 5766, Testing, Reliability, and Application of Micro- and Nano-Material Systems III, (9 May 2005); https://doi.org/10.1117/12.607770

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KEYWORDS

Zinc oxide

Etching

Actuators

Semiconducting wafers

Electrodes

Silicon

Ultrasonics

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