Design and simulation of uncooled bi-material infrared detector

Xin Xu; Fangmin Guo; Wei Lu; Shaoxin Yu; Yuping Ge; Ning Li

doi:10.1117/12.607409

8 December 2004 Design and simulation of uncooled bi-material infrared detector

Xin Xu, Fangmin Guo, Wei Lu, Shaoxin Yu, Yuping Ge, Ning Li

Proceedings Volume 5774, Fifth International Conference on Thin Film Physics and Applications; (2004) https://doi.org/10.1117/12.607409
Event: Fifth International Conference on Thin Film Physics and Applications, 2004, Shanghai, China

Abstract

A new uncooled bi-material microcantilever detector is based on between bi-material large difference in thermal expansion and Young’s modulus, having light, low cost, high sensitivity to radiation, and very matching with silicon IC technologies. A 3D microcantilever detector model had been built and simulated by ANSYS thermal-stress coupled, and gained responses to IR radiation with temperature changes, contributing to maximum deflection of geometry size.

Citation Download Citation

Xin Xu, Fangmin Guo, Wei Lu, Shaoxin Yu, Yuping Ge, and Ning Li "Design and simulation of uncooled bi-material infrared detector", Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, (8 December 2004); https://doi.org/10.1117/12.607409

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