Failure analysis of MEMS RF cantilevered beam switch

Fangmin Guo; Xin Xu; Chengshi Li; Yuping Ge; Jianguo Yu; Peisheng Xin; Rongjin Zhu; Zongshen Lai; Ziqiang Zhu; Wei Lu

doi:10.1117/12.607393

8 December 2004 Failure analysis of MEMS RF cantilevered beam switch

Fangmin Guo, Xin Xu, Chengshi Li, Yuping Ge, Jianguo Yu, Peisheng Xin, Rongjin Zhu, Zongshen Lai, Ziqiang Zhu, Wei Lu

Proceedings Volume 5774, Fifth International Conference on Thin Film Physics and Applications; (2004) https://doi.org/10.1117/12.607393
Event: Fifth International Conference on Thin Film Physics and Applications, 2004, Shanghai, China

Abstract

A surface MEMS miniature switch with the cantilevered arm has been made on low resistivity Si substrate. The switch was inserted into a time domain setup and their lifetimes have been characterized as a function of actuated voltage, demonstrating some relationship among lifetime and threshold voltage. The structure of MEMS RF switch is simulated by ANSYS software, doing some failure analysis and discussing difference comparing the experiment.

Citation Download Citation

Fangmin Guo, Xin Xu, Chengshi Li, Yuping Ge, Jianguo Yu, Peisheng Xin, Rongjin Zhu, Zongshen Lai, Ziqiang Zhu, and Wei Lu "Failure analysis of MEMS RF cantilevered beam switch", Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, (8 December 2004); https://doi.org/10.1117/12.607393

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