Numerical analysis of pull-in voltage for contact MEMS switches in switched-line phase shifter application

Ling Jiang; Yanling Shi; Wei Li; Yanfang Ding; Zongshen Lai; Ziqiang Zhu

doi:10.1117/12.607900

8 December 2004 Numerical analysis of pull-in voltage for contact MEMS switches in switched-line phase shifter application

Ling Jiang, Yanling Shi, Wei Li, Yanfang Ding, Zongshen Lai, Ziqiang Zhu

Author Affiliations +

Proceedings Volume 5774, Fifth International Conference on Thin Film Physics and Applications; (2004) https://doi.org/10.1117/12.607900
Event: Fifth International Conference on Thin Film Physics and Applications, 2004, Shanghai, China

Abstract

This paper presents numerical analysis of pull-in voltage for contact microelectromechanical (MEMS) switch in switched-line phase shifter application. The contact MEMS switch consists of a fixed-fixed thin metal membrane called the “bridge” suspended over a broken center conductor of coplanar waveguide (CPW). The center conductor sandwiched by a pair of symmetrical off-center drive capacitors that form two electrostatic actuators. A lumped-model for two coupled parallel-plates actuators is applied to describe the electromechanical behavior and the pull-in phenomenon in the contact MEMS switch. And a static mechanical model including the residual stress effects is developed to provide the effective stiffness coefficient for the prediction of pull-in voltage in a contact MEMS switch with uniform bridge width. As a theoretical basis, lower pull-in voltage can be achieved by optimizations on structure and material of bridge.

Citation Download Citation

Ling Jiang, Yanling Shi, Wei Li, Yanfang Ding, Zongshen Lai, and Ziqiang Zhu "Numerical analysis of pull-in voltage for contact MEMS switches in switched-line phase shifter application", Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, (8 December 2004); https://doi.org/10.1117/12.607900

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