Piezoelectric PZT thin films derived by sol-gel techniques

Jinrong Cheng; Zhongyan Meng; L. Eric Cross

doi:10.1117/12.607471

8 December 2004 Piezoelectric PZT thin films derived by sol-gel techniques

Jinrong Cheng, Zhongyan Meng, L. Eric Cross

Proceedings Volume 5774, Fifth International Conference on Thin Film Physics and Applications; (2004) https://doi.org/10.1117/12.607471
Event: Fifth International Conference on Thin Film Physics and Applications, 2004, Shanghai, China

Abstract

In this report, piezoelectric Pb(Zr_xTi_1-x)O₃ (PZT) thin films have been prepared onto platinized silicon and stainless steel substrates (SS) respectively, by using the sol-gel spin-on techniques and rapid thermal annealing (RTA) process. (i) Near 4 μm (100) oriented PZT thin films were prepared onto (111)Pt/Ti/SiO₂/Si. The dielectric constant and remnant polarization achieved 1658 and 35 μC/cm² respectively. Zr-rich PZT thin films had higher dielectric constant. The as-prepared PZT thin films were observed to have spontaneous piezoelectric responses, which was prominent in the relatively thinner films. (ii) PZT thin films were successfully deposited onto SS substrates by using a thin template of PbTiO₃ layer. The annealing temperature of PZT was decreased to 550°C. No second phase was detected to the limit of X-ray diffractmeter. The remnant polarization and piezoelectric d₃₁ constant were determined to be 35 μC/cm² and -76 pC/N, respectively. (iii) The origin of the self-poling effect was conjectured to the formation of an internal bias field in PZT thin films. The shift of Curie temperature Tc of PZT thin films was discussed on the base of two-dimensional compressive and tensile stresses introduced by different substrates.

Citation Download Citation

Jinrong Cheng, Zhongyan Meng, and L. Eric Cross "Piezoelectric PZT thin films derived by sol-gel techniques", Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, (8 December 2004); https://doi.org/10.1117/12.607471

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available