The test of new-type MEMS ammonia-sensitive sensor

Lingjie Wang; Jishen Lin

doi:10.1117/12.607481

8 December 2004 The test of new-type MEMS ammonia-sensitive sensor

Lingjie Wang, Jishen Lin

Proceedings Volume 5774, Fifth International Conference on Thin Film Physics and Applications; (2004) https://doi.org/10.1117/12.607481
Event: Fifth International Conference on Thin Film Physics and Applications, 2004, Shanghai, China

Abstract

The paper discusses the test of the new type MEMS ammonia sensitive sensor. The sensor has a MOS structure. The sensitivity and stability of the sensor was studied. The paper focuses on the influence of the thin film decorated on the gate. The experimental results showed that the sensor has a good sensitivity and selectivity, that’s because its gate is decorated by mixed metal thin film. And only when the thin film is between 10nm and 30nm, the sensor was most sensitive to NH₃.

Citation Download Citation

Lingjie Wang and Jishen Lin "The test of new-type MEMS ammonia-sensitive sensor", Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, (8 December 2004); https://doi.org/10.1117/12.607481

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available