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23 February 2005 Digital holographic interferometer for quasistatic and vibrating micro-objects analysis
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A variety of microelements require enhanced tools for their testing at various stages of production and exploitation. It refers to their analysis at static, quasistatic and vibration modes. Especially active, vibrating elements introduce unprecedented requirements concerning their design and testing. In the paper we present methodology and system based on combined digital holographic interferometry (DHI) and time average digital holography (TADH) which enables quantitative analysis of static and slowly changing microelements as well as qualitative analysis of vibrating objects. In DHI due to usage of numerical phases calculated from a sequence of holograms, an arbitrary phase difference related to a chosen stage of varying object can be calculated. TADH provides information about the vibration mode shapes which is crucial for the further analysis of vibrating microelements. Exemplary quantitative results of PZT actuator and membrane out-of-plane deformation measurement and qualitative results of vibrating membrane testing are presented and discussed.
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Leszek Salbut and Jerzy Krezel "Digital holographic interferometer for quasistatic and vibrating micro-objects analysis", Proc. SPIE 5775, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments III, (23 February 2005);

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