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14 February 2005 Calculation and measurement of the Mueller matrix for an elliptical mirror
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Proceedings Volume 5776, Eighth International Symposium on Laser Metrology; (2005)
Event: Eighth International Conference on Laser Metrology, 2005, Merida, Mexico
We have recently developed a scatterometer for bi-dimensional rough surfaces which uses an elliptical mirror to direct the light toward the rough surface and to collect the scattered light and direct it to a CCD camera. This device has advantages over similar previous devices such as the time needed for measurement and operation range. We have calculated and measured the Mueller matrix of the elliptical mirror and we have compared them to test the validity of our method. Preliminary results show differences between theory and experiment that must be explained.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Oscar G. Rodriguez-Herrera, Neil Charles Bruce, and Martha Rosete-Aguilar "Calculation and measurement of the Mueller matrix for an elliptical mirror", Proc. SPIE 5776, Eighth International Symposium on Laser Metrology, (14 February 2005);


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