Recent developments in spectral interference microscopes

Mitsuo Takeda; Dalip Singh Mehta; Michal Emanuel Pawlowski; Takashi Kurokawa

doi:10.1117/12.611596

14 February 2005 Recent developments in spectral interference microscopes

Mitsuo Takeda, Dalip Singh Mehta, Michal Emanuel Pawlowski, Takashi Kurokawa

Proceedings Volume 5776, Eighth International Symposium on Laser Metrology; (2005) https://doi.org/10.1117/12.611596
Event: Eighth International Conference on Laser Metrology, 2005, Merida, Mexico

Abstract

We will review recent developments in spectral interference microscopes for surface profilometry and tomography of discontinuous micro objects. To give specific examples, we will introduce some of the new devices and systems that have been developed in this group, among which are a tandem frequency-tunable liquid-crystal Fabry-Perot device with high spectral resolution and a wide tunable range, and a spectral interference microscope with a digital-holography-based numerical refocusing function to extend effective depth of focus.

Citation Download Citation

Mitsuo Takeda, Dalip Singh Mehta, Michal Emanuel Pawlowski, and Takashi Kurokawa "Recent developments in spectral interference microscopes", Proc. SPIE 5776, Eighth International Symposium on Laser Metrology, (14 February 2005); https://doi.org/10.1117/12.611596

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