Uncertainty evaluation of displacements measured by ESPI with divergent wavefronts

Amalia Martinez; Raul Cordero; Juan A. Rayas; Hugo J. Puga; Ramon Rodriguez-Vera

doi:10.1117/12.611903

14 February 2005 Uncertainty evaluation of displacements measured by ESPI with divergent wavefronts

Amalia Martinez, Raul Cordero, Juan A. Rayas, Hugo J. Puga, Ramon Rodriguez-Vera

Proceedings Volume 5776, Eighth International Symposium on Laser Metrology; (2005) https://doi.org/10.1117/12.611903
Event: Eighth International Conference on Laser Metrology, 2005, Merida, Mexico

Abstract

Displacement measurements by optical interferometry are affected by errors in the determination of the phase-difference and in interferometer sensitivity. In this paper, we perform an uncertainty analysis of displacements measured by in-plane ESPI with spherical wavefronts. The displacements were induced by applying uniaxial tensile load on a nominally flat elastic sample. Our attention was focused on the quantification of the effect of eventual errors in the sensitivity vector determination. We found that the displacement uncertainty depends on the geometry of the optical arrangement, and on the dimensions of the illuminated field. Moreover, the displacement uncertainty increases with the deformation.

Citation Download Citation

Amalia Martinez, Raul Cordero, Juan A. Rayas, Hugo J. Puga, and Ramon Rodriguez-Vera "Uncertainty evaluation of displacements measured by ESPI with divergent wavefronts", Proc. SPIE 5776, Eighth International Symposium on Laser Metrology, (14 February 2005); https://doi.org/10.1117/12.611903

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