Beam homogenization: theory, modeling, and application to an excimer laser beam

E. Tefouet Kana; S. Bollanti; P. Di Lazzaro; D. Murra

doi:10.1117/12.611252

23 March 2005 Beam homogenization: theory, modeling, and application to an excimer laser beam

E. Tefouet Kana, S. Bollanti, P. Di Lazzaro, D. Murra

Proceedings Volume 5777, XV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers; (2005) https://doi.org/10.1117/12.611252
Event: XV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, 2004, Prague, Czech Republic

Abstract

An innovative approach is presented for modelling laser beam homogenization by means of the integration method. The numerical results are compared with experimental data, and the influence of the measurement technique is discussed.

Citation Download Citation

E. Tefouet Kana, S. Bollanti, P. Di Lazzaro, and D. Murra "Beam homogenization: theory, modeling, and application to an excimer laser beam", Proc. SPIE 5777, XV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, (23 March 2005); https://doi.org/10.1117/12.611252

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