Translator Disclaimer
Paper
23 March 2005 Progress in the development of compact excimer lasers
Author Affiliations +
Proceedings Volume 5777, XV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers; (2005) https://doi.org/10.1117/12.611119
Event: XV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, 2004, Prague, Czech Republic
Abstract
Compact excimer laser systems were developed for industrial applications especially for micro-machining applications. Therefore all components and modules are designed for long-term operation and long maintenance intervals. By using new designs and technologies the performance of these laser systems could be improved in comparison to the well-known compact excimer lasers. The result of the first tests of the prototype are presented. The laser tube lifetime could be more than doubled in comparison to the former laser design. Additionally maximum repetition rates of 2kHz were demonstrated for the prototype 193 nm laser systems. A maximum pulse energy of about 40 mJ was measured. The pulse-to-pulse stability was reduced below 1% (one sigma) in the working area of the laser. The state-of-the-art of compact excimer lasers will be presented and outlook for the future will be given.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Andreas Goertler and Claus Strowitzki "Progress in the development of compact excimer lasers", Proc. SPIE 5777, XV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, (23 March 2005); https://doi.org/10.1117/12.611119
PROCEEDINGS
4 PAGES


SHARE
Advertisement
Advertisement
RELATED CONTENT

Long-term tests of compact excimer lasers
Proceedings of SPIE (April 26 2007)
The Design Of Excimer Lasers For Use In Microlithography
Proceedings of SPIE (January 01 1988)
Excimer Laser Technology
Proceedings of SPIE (October 31 1980)

Back to Top