Paper
18 May 2005 Diffractively structured GaAs EOIR windows
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Abstract
A process to diffractively structure GaAs for enhanced optical performance is described. The benefits of diffractively structuring an EOIR window material include improved FOR/FOV, consistent broadband performance, the ability to design and implement hyper-spectral characteristics directly into the substrate without incorporating a complex anti-reflective coating. Progress to date will be discussed including design evolution, process implementation, and optical characterization using the Automated Rasterable Integrated Spectrometer and TIS Measurement System (ARISTMS). Results will be presented on 100mm diameter samples.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Michael Wilson, Phillip Coulter, Jay A. Hammer, and Gregg T. Borek "Diffractively structured GaAs EOIR windows", Proc. SPIE 5786, Window and Dome Technologies and Materials IX, (18 May 2005); https://doi.org/10.1117/12.607454
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KEYWORDS
Etching

Gallium arsenide

Semiconducting wafers

Photoresist materials

Atomic force microscopy

Reflectivity

Transmittance

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