Cumulative damage effects in different machining strategies for 2.5D laser micro structuring of polyimide

D. Ilie; C. Mullan; Sebastian Favre; Gerared M. O'Connor; Thomas J. Glynn

doi:10.1117/12.605153

8 June 2005 Cumulative damage effects in different machining strategies for 2.5D laser micro structuring of polyimide

D. Ilie, C. Mullan, Sebastian Favre, Gerared M. O'Connor, Thomas J. Glynn

Proceedings Volume 5827, Opto-Ireland 2005: Photonic Engineering; (2005) https://doi.org/10.1117/12.605153
Event: OPTO-Ireland, 2005, Dublin, Ireland

Abstract

Polymers play an important role in many applications such as microelectronics and medical devices. Micro-channels and shaped holes can be produced by 2.5D micro-structuring with excimer laser sources using mask projection. The industrial cost associated with these processes can be greatly reduced by the use of solid-state lasers due to their lower cost and maintenance. For this purpose, we investigate the interaction of polyimide (Kapton) with solid-state lasers emitting in the UV (266 & 355 nm) spectral range. The study presents a comparison of the ablation profiles obtained for different laser sources and these are discussed in term of roughness and efficiency. Limitations on the actual motion system (scan-head) are evident and the need to control the material removed by a small Gaussian beam in terms of overlapping for the direct writing process will be highlighted.

Citation Download Citation

D. Ilie, C. Mullan, Sebastian Favre, Gerared M. O'Connor, and Thomas J. Glynn "Cumulative damage effects in different machining strategies for 2.5D laser micro structuring of polyimide", Proc. SPIE 5827, Opto-Ireland 2005: Photonic Engineering, (8 June 2005); https://doi.org/10.1117/12.605153

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