Uncooled microbolometer IR FPA based on sol-gel VOx

V. N. Ovsyuk; V. V. Shashkin; M. A. Dem'yanenko; B. I. Fomin; L. L. Vasil'ieva; A. P. Soloviev

doi:10.1117/12.628663

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7 June 2005 Uncooled microbolometer IR FPA based on sol-gel VO_x

V. N. Ovsyuk, V. V. Shashkin, M. A. Dem'yanenko, B. I. Fomin, L. L. Vasil'ieva, A. P. Soloviev

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Proceedings Volume 5834, 18th International Conference on Photoelectronics and Night Vision Devices; (2005) https://doi.org/10.1117/12.628663
Event: 18th International Conference on Photoelectronics and Night Vision Devices and Quantum Informatics 2004, 2004, Moscow, Russian Federation

Abstract

The technology of high-quality uncooled focal plane arrays (FPA) fabrication has been developed. Simple and cheap sol-gel technology of thermosensitive vanadium oxide layers preparation is underlain in its basis. Uncooled 160x120 and 320x240 FPA for 8-14 microns spectral range have been fabricated. The noise equivalent temperature difference less than 8OmK has been achieved at frame rate 60 Hz for 160x120 FPA and at use of optics with 1/1 relative aperture.

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V. N. Ovsyuk, V. V. Shashkin, M. A. Dem'yanenko, B. I. Fomin, L. L. Vasil'ieva, and A. P. Soloviev "Uncooled microbolometer IR FPA based on sol-gel VO_x", Proc. SPIE 5834, 18th International Conference on Photoelectronics and Night Vision Devices, (7 June 2005); https://doi.org/10.1117/12.628663

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