A current density distribution approach to the optimisation of RF-MEMS variable capacitors

Suat Ayoz; Hatice M. Tuncer; Florin Udrea; Adrian Ionescu; Raphael Fritschi

doi:10.1117/12.608587

1 July 2005 A current density distribution approach to the optimisation of RF-MEMS variable capacitors

Suat Ayoz, Hatice M. Tuncer, Florin Udrea, Adrian Ionescu, Raphael Fritschi

Proceedings Volume 5836, Smart Sensors, Actuators, and MEMS II; (2005) https://doi.org/10.1117/12.608587
Event: Microtechnologies for the New Millennium 2005, 2005, Sevilla, Spain

Abstract

An argument for the geometry based frequency range extension of tunable MEMS capacitors is presented. It is shown that, besides reducing the length of the feed arms, the parasitic inductances in a parallel-plate MEMS capacitor can be reduced further by optimising the plate geometry. Extension of the self resonance frequency is demonstrated with reduced circumference of the plate, due to high-frequency currents travelling around the edge of the plate and acting as a major component affecting the self-resonance frequency (SRF) of the capacitor. Full-wave 2.5-D electromagnetic simulation results using Agilent EEsof's ADS Momentum are presented that demonstrate the improvement in self-resonance frequency of circular and symmetrically fed structures. It is shown that efforts in shortening current paths by means of slots did not yield significant further improvement.

Citation Download Citation

Suat Ayoz, Hatice M. Tuncer, Florin Udrea, Adrian Ionescu, and Raphael Fritschi "A current density distribution approach to the optimisation of RF-MEMS variable capacitors", Proc. SPIE 5836, Smart Sensors, Actuators, and MEMS II, (1 July 2005); https://doi.org/10.1117/12.608587

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