Advanced 3D micromachining techniques using V-UV laser sources in the nanosecond regime

J. L. Ocana; C. Molpeceres; S. Lauzurica; M. Morales

doi:10.1117/12.608818

1 July 2005 Advanced 3D micromachining techniques using V-UV laser sources in the nanosecond regime

J. L. Ocana, C. Molpeceres, S. Lauzurica, M. Morales

Proceedings Volume 5836, Smart Sensors, Actuators, and MEMS II; (2005) https://doi.org/10.1117/12.608818
Event: Microtechnologies for the New Millennium 2005, 2005, Sevilla, Spain

Abstract

Laser micromachining techniques are among the most promising fabrication processes in strategic industrial fields. Although lasers systems have been widely applied last twenty years in semiconductor industry for microfabrication process development, the current availability of new excimer and Diode Pumped Solid State Lasers (DPSS) sources are extending the applications fields of laser microprocessing. Nowadays MEMs, fluidic devices, advanced sensors and biomedical devices and instruments are among the more promising developments of this technology. Nevertheless the fast progress of this technology has brought as a consequence the building up of specific laser based machines for each process of interest (most of them until now strictly 2D), and an important gap has been generated, from the fabrication point of view, in fully 3D potential applications. In this work, the conception, design and first results of a fully automatized 3D laser micromachining workstation, based on the main concept of flexibility, is presented. This system integrates two UV laser sources, excimer and DPSS in ns pulse regime, and an advanced positioning system (with six degrees of freedom) for complex parts machining. Several examples of first results obtained with this system, including processing of semiconductors for sensoring and photovoltaic applications, organic materials for biomedical devices and metallic materials for different strategic industrial sectors are presented.

Citation Download Citation

J. L. Ocana, C. Molpeceres, S. Lauzurica, and M. Morales "Advanced 3D micromachining techniques using V-UV laser sources in the nanosecond regime", Proc. SPIE 5836, Smart Sensors, Actuators, and MEMS II, (1 July 2005); https://doi.org/10.1117/12.608818

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KEYWORDS

Laser ablation

Micromachining

Diode pumped solid state lasers

Excimer lasers

Excimers

Laser applications

Laser sources

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