Translator Disclaimer
1 July 2005 Thermal-stress control of microshutter arrays in cryogenic applications for the James Webb Space Telescope
Author Affiliations +
Proceedings Volume 5836, Smart Sensors, Actuators, and MEMS II; (2005)
Event: Microtechnologies for the New Millennium 2005, 2005, Sevilla, Spain
We report on methods to minimize thermally-induced deformation in a MEMS-based reconfigurable aperture. The device is an enabling component of the Near-Infrared Spectrometer, a principle instrument on NASA’s James Webb Space Telescope. The Microshutter Array consists of 384x175 individually addressable shutters which can be magnetically rotated 90° into the plane of the array and electrostatically latched open. Each shutter is a 100x200 μm rectangular membrane suspended by a small neck region and torsion flexure. The primary materials in the shutter are a 5000Å Si3N4 layer for mechanical rigidity, 2000Å Al for opacity and electrostatic latching, and 2200Å Co90Fe10 for magnetic actuation. This multi-layer stack presents a challenge due to the operating temperatures required for the device: both room temperature (300K) and cryogenic temperature (30K). Thermal expansion of the materials causes the shutters to bow out of plane excessively, which can prevent actuation of the shutters, cause damage to portions of the array, and allow light leakage around closed shutters. Here we present our investigation of several methods to prevent microshutter bowing including deposition of additional materials on the shutters to create a symmetrical layer stack and replacing the current stack with low-coefficient of thermal expansion materials. Using shutter-size suspended cantilever beams as a rapid-development test bed, we have reduced out-of-plane bowing between 300K and 30K to 10% or better. We are currently applying these results to microshutter arrays to develop shutters that remain flat from room temperature to cryogenic temperature while retaining the required mechanical, optical, and magnetic properties.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Daniel P. Kelly, Wen-Hsien Chuang, Larry Hess, Ron Hu, Murzy Jhabvala, Todd King, Mary J. Li, James Loughlin, S. Harvey Moseley, Christopher Ray, and Yun Zheng "Thermal-stress control of microshutter arrays in cryogenic applications for the James Webb Space Telescope", Proc. SPIE 5836, Smart Sensors, Actuators, and MEMS II, (1 July 2005);

Back to Top