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28 June 2005 SWCNT aggregates for gas sensing applications
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Proceedings Volume 5838, Nanotechnology II; (2005)
Event: Microtechnologies for the New Millennium 2005, 2005, Sevilla, Spain
In the present research, purified commercially SWCNTs are used as gas sensing material in an interdigitated electrode platform for NH3, NOx and H2O detection. The SWCNT response to gas absorption is known to be dependent from different parameters and operational conditions, such as the relative orientation of the nanotubes and their organization between the electrodes, the temperature of the sensor, and moreover the voltage applied to a back gate contact. We show the sensor response for the various gas species considered and we analyze the sensor behavior with respect to the sensibility and to the detection velocity. Moreover we studied the effect on absorption/desorption gas processes by applying a gate voltage to the Si substrate beneath the interdigitated electrodes. The results indicate that the acceleration of the time response of the sensor for the detection of NH3 is proportional to the gate voltage in the range 0 V - 40 V.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
M. Lucci, P. Regoliosi, A. Reale, A. Di Carlo, E. Tamburri, S. Orlanducci, M. L. Terranova, and P. Lugli "SWCNT aggregates for gas sensing applications", Proc. SPIE 5838, Nanotechnology II, (28 June 2005);


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