Nanocrystalline diamond films: laser assisted fabrication, optical and electronic properties

S. M. Pimenov; V. G. Ralchenko; V. I. Konov; A. V. Khomich; E. V. Zavedeev; V. D. Frolov

doi:10.1117/12.633665

7 June 2005 Nanocrystalline diamond films: laser assisted fabrication, optical and electronic properties

S. M. Pimenov, V. G. Ralchenko, V. I. Konov, A. V. Khomich, E. V. Zavedeev, V. D. Frolov

Proceedings Volume 5850, Advanced Laser Technologies 2004; (2005) https://doi.org/10.1117/12.633665
Event: Advanced Laser Technologies 2004, 2004, Rome and Frascati, Italy

Abstract

In this paper, experimental data are presented on the synthesis and properties of nanocrystalline diamond (NCD) films grown by a dc plasma CVD technique from various gas mixtures (CH₄-H₂, CH₄-H₂-Ar, CH₄-Ar, CH₄-H₂-N₂, CH₄-Ar- N₂). The interrelation between the CVD conditions, the film microstructure and film properties is established using Raman spectroscopy, XRD, XPS, AES, SEM, TEM, AFM/STM, spectroscopic ellipsometry and optical transmission spectroscopy techniques. Experimental methods for laser assisted fabrication of ultrathin and highly smooth NCD films are described. Effects of the deposition parameters (substrate temperature, CH₄ content, addition of Ar gas to CH/H₂ gas mixtures) on the grain size, surface roughness and optical properties of NCD films are discussed. Results of nitrogen doping of nanocrystalline diamond films are presented and discussed.

Citation Download Citation

S. M. Pimenov, V. G. Ralchenko, V. I. Konov, A. V. Khomich, E. V. Zavedeev, and V. D. Frolov "Nanocrystalline diamond films: laser assisted fabrication, optical and electronic properties", Proc. SPIE 5850, Advanced Laser Technologies 2004, (7 June 2005); https://doi.org/10.1117/12.633665

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