Fabrication and characterization of piezoelectric cantilever for micro transducers

Jin Xie; Min Hu; Shih-Fu Ling; Hejun Du

doi:10.1117/12.621532

12 April 2005 Fabrication and characterization of piezoelectric cantilever for micro transducers

Jin Xie, Min Hu, Shih-Fu Ling, Hejun Du

Proceedings Volume 5852, Third International Conference on Experimental Mechanics and Third Conference of the Asian Committee on Experimental Mechanics; (2005) https://doi.org/10.1117/12.621532
Event: Third International Conference on Experimental Mechanics and Third Conference of the Asian Committee on Experimental Mechanics, 2004, -, Singapore

Abstract

A modified sol-gel process for lead zirconate titanate (PZT) thin film deposition has been presented to overcome the problems of film cracking, short-circuiting and diffusion of PZT to substrate. In the modified sol-gel process, we pattern the pyrolyzed PZT thin film by wet etching before every treatment of post-annealing for crystallization. The modification brings two advantages: film cracking is eliminated due to the reduction of internal stress; PZT diffusion to substrate is avoided due to removing PZT film from the areas without Pt buffer layer before high-temperature post-annealing treatment. The modified sol-gel process is applied to fabrication of piezoelectric cantilever, which includes sputtering and patterning top and bottom electrodes, depositing PZT layer by the modified sol-gel process and releasing cantilever structure by a double side deep reaction ion etching process. After the fabrication, performances of PZT thin film such as hysteresis loop upon polarization and X-ray diffraction pattern are evaluated. Finally, resonant frequency is measured for the fabricated piezoelectric cantilever to verify its self-exited capability for future applications as micro sensors or actuators. These experimental results indicate that the modified sol-gel process for PZT deposition can greatly improve quality and yield rate of the fabrication of piezoelectric devices without causing any adverse effect.

Citation Download Citation

Jin Xie, Min Hu, Shih-Fu Ling, and Hejun Du "Fabrication and characterization of piezoelectric cantilever for micro transducers", Proc. SPIE 5852, Third International Conference on Experimental Mechanics and Third Conference of the Asian Committee on Experimental Mechanics, (12 April 2005); https://doi.org/10.1117/12.621532

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KEYWORDS

Ferroelectric materials

Sol-gels

Thin films

Electrodes

Thin film deposition

Platinum

Diffusion

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