Lithography process related OPC development and verification demonstration on a sub-90nm poly layer

Chi-Yuan Hung; Qingwei Liu; Liguo Zhang; Shumay Shang; Andrew Jost

doi:10.1117/12.617194

28 June 2005 Lithography process related OPC development and verification demonstration on a sub-90nm poly layer

Chi-Yuan Hung, Qingwei Liu, Liguo Zhang, Shumay Shang, Andrew Jost

Proceedings Volume 5853, Photomask and Next-Generation Lithography Mask Technology XII; (2005) https://doi.org/10.1117/12.617194
Event: Photomask and Next Generation Lithography Mask Technology XII, 2005, Yokohama, Japan

Abstract

Using a commercialized product Calibre OPC platform, optical and process models were built that accurately predict wafer-level phenomena for a sub-90nm poly process. The model fidelity relative to nominal wafer data demonstrates excellent result, with EPE errors in the range of ±2nm for pitch features and ±7 for line-end features. Furthermore, these models accurately predict defocus and off-dose wafer data. Overlaying SEM images with model-predicted print images for critical structures shows that the models are stable and accurate, even in areas especially prone to pinching or bridging. In addition, process window ORC is shown to identify potential failure points within some representative designs, allowing the mask preparation shop to easily identify these areas within the fractured data. And finally, the data and images of mask hotspots will be shown and compared down to wafer level.

Citation Download Citation

Chi-Yuan Hung, Qingwei Liu, Liguo Zhang, Shumay Shang, and Andrew Jost "Lithography process related OPC development and verification demonstration on a sub-90nm poly layer", Proc. SPIE 5853, Photomask and Next-Generation Lithography Mask Technology XII, (28 June 2005); https://doi.org/10.1117/12.617194

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available