Focused ion beam structuring of photonic components and sensors

Philipp M. Nellen; Rolf Broennimann

doi:10.1117/12.623455

23 May 2005 Focused ion beam structuring of photonic components and sensors

Philipp M. Nellen, Rolf Broennimann

Proceedings Volume 5855, 17th International Conference on Optical Fibre Sensors; (2005) https://doi.org/10.1117/12.623455
Event: 17th International Conference on Optical Fibre Sensors, 2005, Bruges, Belgium

Abstract

This paper discusses direct focused ion beam (FIB) writing of microstructured photonic elements and sensors like apertures on tips of optical fibers, microlenses, or photonic crystals. Emphasis is mainly on the fabrication side.

Citation Download Citation

Philipp M. Nellen and Rolf Broennimann "Focused ion beam structuring of photonic components and sensors", Proc. SPIE 5855, 17th International Conference on Optical Fibre Sensors, (23 May 2005); https://doi.org/10.1117/12.623455

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