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23 May 2005 Focused ion beam structuring of photonic components and sensors
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Proceedings Volume 5855, 17th International Conference on Optical Fibre Sensors; (2005) https://doi.org/10.1117/12.623455
Event: 17th International Conference on Optical Fibre Sensors, 2005, Bruges, Belgium
Abstract
This paper discusses direct focused ion beam (FIB) writing of microstructured photonic elements and sensors like apertures on tips of optical fibers, microlenses, or photonic crystals. Emphasis is mainly on the fabrication side.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Philipp M. Nellen and Rolf Broennimann "Focused ion beam structuring of photonic components and sensors", Proc. SPIE 5855, 17th International Conference on Optical Fibre Sensors, (23 May 2005); https://doi.org/10.1117/12.623455
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