A focus sensor for an application in a nanopositioning and nanomeasuring machine

Rostyslav Mastylo; Denis Dontsov; Eberhard Manske; Gerd Jager

doi:10.1117/12.612887

13 June 2005 A focus sensor for an application in a nanopositioning and nanomeasuring machine

Rostyslav Mastylo, Denis Dontsov, Eberhard Manske, Gerd Jager

Proceedings Volume 5856, Optical Measurement Systems for Industrial Inspection IV; (2005) https://doi.org/10.1117/12.612887
Event: Optical Metrology, 2005, Munich, Germany

Abstract

A focus sensor on the basis of a hologram laser unit was developed and successfully tested in a nanopositioning and nanomeasuring machine as a zero indicator. The high resolution of the focus sensor is due to a high-precision optical adjustment and special solutions incorporated into the electronic parts. Thus, any sensor malfunctions caused by back-reflected light inside of the assembly could be completely avoided by means of the special high-frequency modulation and laser power stabilization. Common mode noise reduction provides the high SNR of the output signals. The measurements were made according to a dynamic principle by permanent difference formation between the output signal of the focus sensor and the length value of the z-interferometer of the nanopositioning and nanomeasuring machine. The measuring results are presented, and further possibilities of application are outlined.

Citation Download Citation

Rostyslav Mastylo, Denis Dontsov, Eberhard Manske, and Gerd Jager "A focus sensor for an application in a nanopositioning and nanomeasuring machine", Proc. SPIE 5856, Optical Measurement Systems for Industrial Inspection IV, (13 June 2005); https://doi.org/10.1117/12.612887

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